| PSI's plating tools are specifically designed for electrolytic plating of silicon, gallium arsenide, and similar glass-type substrates. Patented plating cell configurations utilize a rotating cathode, along with reciprocating anodes (9000 series) or carousel assembly (8000 series). During plating, as the wafer rotates about the anode, the center portion of the wafer receives greater exposer to the anodes. |
 The diagram at the left illustrates the cumulative anode center line path, traced relative to a wafer when the system is operated at a speed ratio of (7) anode cycles per (9) rotations of the fixture wheel. The 9000 series tools utilize a reciprocating anode assembly (assembly traverses back and forth while the wafer rotates). The 8000 series tools utilize a carousel assembly to move the wafers around center-mounted anodes, while the wafers themselves rotate. |
